Micromachined fountain pen for atomic force microscope based nanopatterning

Deladi, S. and Tas, N.R. and Berenschot, J.W. and Krijnen, G.J.M. and Boer de, M.J. and Boer de, J.H. and Peter, M. and Elwenspoek, M.C. (2004) Micromachined fountain pen for atomic force microscope based nanopatterning. Applied Physics Letters, 85 (22). pp. 5361-5363. ISSN 0003-6951

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Abstract:	We present a tool that can be used in standard atomic force microscope and that enables chemical, chemical/mechanical, or physical surface modification using continuous liquid supply. The device consists of a reservoir micromachined into the probe support that is connected to fluidic channels embedded in a V-shaped cantilever. Via the fluidic channels, the liquid reaches the tip. The fluid transport to the sample surface is demonstrated and fountain pen lithography applications are presented.
Item Type:	Article
Copyright:	© 2004 American Institute of Physics
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/48341
Official URL:	http://dx.doi.org/10.1063/1.1823040
Publisher URL:	http://link.aip.org/link/?APPLAB/85/5361/1
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