Detection of and protection against plasma charging damage in modern ic technology


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Wang, Zhichun (2004) Detection of and protection against plasma charging damage in modern ic technology. thesis.

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Abstract:In this thesis, the ways to detect and reduce plasma charging damage in the context of back-end-of-line (BEOL) processes have been studied.
Item Type:Thesis
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/48249
Official URL:http://doc.utwente.nl/48249/
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Metis ID: 218733