Back to University of Twente portal
Detection of and protection against plasma charging damage in modern ic technology
Wang, Zhichun (2004) Detection of and protection against plasma charging damage in modern ic technology. thesis.
![[img]](http://doc.utwente.nl/style/images/fileicons/application_pdf.png)
| PDF 2285Kb |
| Abstract: | In this thesis, the ways to detect and reduce plasma charging damage in the context of back-end-of-line (BEOL) processes have been studied. |
| Item Type: | Thesis |
| Faculty: | Electrical Engineering, Mathematics and Computer Science (EEMCS) |
| Research Group: | |
| Link to this item: | http://purl.utwente.nl/publications/48249 |
| Official URL: | http://doc.utwente.nl/48249/ |
| Export this item as: | BibTeX EndNote HTML Citation Reference Manager |
Show download statistics for this publication
Show download statistics for this publicationRepository Staff Only: item control page
Metis ID: 218733