1-D nanochannels fabricated in polyimide

Eijkel, Jan C.T. and Bomer, Johan and Tas, Niels R. and Berg van den, Albert (2004) 1-D nanochannels fabricated in polyimide. Lab on a Chip, 4 (3). pp. 161-163. ISSN 1473-0197

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Abstract:	A simple method using spin-deposition and sacrificial layer etching is used to fabricate all-polyimide nanochannels (100 and 500 nm channel height). Channels are characterized using spontaneous capillary filling with water, ethanol and isopropanol, and with electroosmotic flow. The channels can be produced with simple cleanroom equipment, namely spinning and metal deposition facilities. Polyimide is an excellent material for micro- and nanofluidic channels due to its favourable electrical and mechanical properties and its biocompatibility.
Item Type:	Article
Copyright:	© 2004 Royal Society of Chemistry
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Biomedical and Environmental Sensor systems (BIOS) Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/47958
Official URL:	http://dx.doi.org/10.1039/b315859d
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