Fabrication and mechanical testing of glass chips for high pressure synthetic or analytical chemistry
Oosterbroek, R.E. and Hermes, D.C. and Kakuta, M. and Benito-Lopez, F. and Verboom, W. and Gardeniers, J.G.E. and Berg van den, A. (2004) Fabrication and mechanical testing of glass chips for high pressure synthetic or analytical chemistry. In: First Mikropruf Workshop on Wafer Bonding for MEMS Technologies, 11-12 October 2004, Saale, Germany.
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|Item Type:||Conference or Workshop Item|
Science and Technology (TNW)
Electrical Engineering, Mathematics and Computer Science (EEMCS)
|Link to this item:||http://purl.utwente.nl/publications/47847|
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