Fabrication and mechanical testing of glass chips for high pressure synthetic or analytical chemistry

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Oosterbroek, R.E. and Hermes, D.C. and Kakuta, M. and Benito-Lopez, F. and Verboom, W. and Gardeniers, J.G.E. and Berg, A. van den (2004) Fabrication and mechanical testing of glass chips for high pressure synthetic or analytical chemistry. In: First Mikropruf Workshop on Wafer Bonding for MEMS Technologies, 11-12 October 2004, Saale, Germany.

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Item Type:Conference or Workshop Item
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Science and Technology (TNW)
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/47847
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Metis ID: 218783