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Pulsed laser deposition of dielectrics
Blank, D.H.A. and Doeswijk, L.M. and Karakaya, K. and Koster, G. and Rijnders, A.J.H.M. (2004) Pulsed laser deposition of dielectrics. In: High-K Gate Dielectric. IOP Publishing Ltd., Bristol, pp. 89-122. ISBN 9780750309066
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| Item Type: | Book Section |
| Copyright: | © 2004 IOP Publishing |
| Faculty: | Science and Technology (TNW) |
| Research Group: | |
| Link to this item: | http://purl.utwente.nl/publications/47717 |
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Metis ID: 218557