Pulsed laser deposition of dielectrics


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Blank, D.H.A. and Doeswijk, L.M. and Karakaya, K. and Koster, G. and Rijnders, A.J.H.M. (2004) Pulsed laser deposition of dielectrics. In: High-K Gate Dielectric. IOP Publishing Ltd., Bristol, pp. 89-122. ISBN 9780750309066

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Item Type:Book Section
Copyright:© 2004 IOP Publishing
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Science and Technology (TNW)
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Link to this item:http://purl.utwente.nl/publications/47717
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Metis ID: 218557