Pirani pressure sensor with distributed temperature measurement

Jong de, B.R. and Bula, W.P. and Zalewski, D.R. and Baar van, J.J. and Wiegerink, R.J. (2003) Pirani pressure sensor with distributed temperature measurement. In: IEEE Sensors 2003 Conference, 22-24 Oct. 2003, Toronto, Canada.

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Abstract:	Surface micromachined distributed Pirani pressure gauges, with designed heater-to-heat sink distances (gap-heights) of 0.35 /spl mu/rn and 1.10 /spl mu/m, are successfully fabricated, modeled and characterized. Measurements and model response correspond within 5 % of the measured value in a pressure range of 10 to 2*10/sup 4/ Pa. The distributed nature of the sensor facilitates pressure measurement to be independent of the Temperature Coefficient of Resistance of the resistors. This also provides an inherent compensation for heat loss via the membrane supporting the heater, extending the lower pressure range.
Item Type:	Conference or Workshop Item
Copyright:	© 2003 IEEE
Faculty:	Science and Technology (TNW) Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Mesoscale Chemical Systems (MCS) Energy, Materials and Systems (EMS) Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/46528
Official URL:	http://dx.doi.org/10.1109/ICSENS.2003.1279033
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