Capacitance measurements for micromachined capacitive long-range position sensor

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Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (2003) Capacitance measurements for micromachined capacitive long-range position sensor. In: SAFE/SeSens 2003, November 25-26, 2003, Veldhoven, the Netherlands.

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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