Capacitance measurements for micromachined capacitive long-range position sensor

Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (2003) Capacitance measurements for micromachined capacitive long-range position sensor. In: SAFE/SeSens 2003, November 25-26, 2003, Veldhoven, the Netherlands.

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Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/46527
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