Micromachined capacitive long-range displacement sensor


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Kuijpers, Toon A.A. and Krijnen, Gijs J.M. and Lammerink, Theo S.J. and Wiegerink, Remco J. and Elwenspoek, Miko C. (2003) Micromachined capacitive long-range displacement sensor. In: Eurosensors XVII, European Conference on Solid-State Transducers, September 21-24, 2003, Guimaraes, Portugal (pp. pp. 330-331).

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Abstract:First measurement results are presented for a surface-micromachined long-range (50– 100 μm) periodic capacitive position sensor. The sensor consists of two periodic geometries (period = 10 μm) sliding along each other with minimum spacing of about 1.5 μm. The relative displacement between the two, results in a periodic change in capacitance. An electrostatic comb-drive actuator is employed to generate displacements. Measured maximum capacitance change ΔC=0.72 fF corresponds to simulation results but needs better shielding from external noise sources. The results show this sensorconcept can potentially lead towards long-range nano-positioning control of microactuator systems.
Item Type:Conference or Workshop Item
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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/46526
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Metis ID: 215251