Study of preferred oriented (002) AIN thin films on Si (100) substrates by RF reactive sputtering for piezoelectric applications

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Saravanan, S. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Study of preferred oriented (002) AIN thin films on Si (100) substrates by RF reactive sputtering for piezoelectric applications. In: SAFE/SeSens 2003, November 25-26, 2003, Veldhoven, the Netherlands.

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Metis ID: 215250