Study of preferred oriented (002) AIN thin films on Si (100) substrates by RF reactive sputtering for piezoelectric applications

Saravanan, S. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Study of preferred oriented (002) AIN thin films on Si (100) substrates by RF reactive sputtering for piezoelectric applications. In: SAFE/SeSens 2003, November 25-26, 2003, Veldhoven, the Netherlands.

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Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/46525
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Metis ID: 215250