Fabrication of arrays of artificial hairs for complex flow pattern recognition

Baar van, J.J. and Dijkstra, M. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2003) Fabrication of arrays of artificial hairs for complex flow pattern recognition. In: IEEE Sensors Conference 2003, October 22-24, 2003, Toronto, Canada.

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Abstract:	We present monolithically integrated high-density arrays of artificial hairs for flow pattern measurements based on drag force. A combined bulk/surface micromachining process has been developed to integrate the artificial hairs with capacitive read-out. First fabrication results show the possibility to fabricate out-of-plane hairs without reverting to micro-assembly technologies. This enables realisation of high-density arrays of symmetrical sensors with two-dimensional sensitivity.
Item Type:	Conference or Workshop Item
Copyright:	©2003 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/46523
Official URL:	http://dx.doi.org/10.1109/ICSENS.2003.1278952
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