Fabrication of arrays of artificial hairs for complex flow pattern recognition


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Baar, J.J. van and Dijkstra, M. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2003) Fabrication of arrays of artificial hairs for complex flow pattern recognition. In: IEEE Sensors Conference 2003, October 22-24, 2003, Toronto, Canada (pp. pp. 332-336).

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Abstract:We present monolithically integrated high-density arrays of artificial hairs for flow pattern measurements based on drag force. A combined bulk/surface micromachining process has been developed to integrate the artificial hairs with capacitive read-out. First fabrication results show the possibility to fabricate out-of-plane hairs without reverting to micro-assembly technologies. This enables realisation of high-density arrays of symmetrical sensors with two-dimensional sensitivity.
Item Type:Conference or Workshop Item
Copyright:©2003 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/46523
Official URL:http://dx.doi.org/10.1109/ICSENS.2003.1278952
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