Micromachined two dimensional resistor arrays for determination of gas parameters


Baar, J.J. van and Verwey, W.B. and Dijkstra, M. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M. (2003) Micromachined two dimensional resistor arrays for determination of gas parameters. In: 12th International Conference on TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 8-12 June 2003, Boston, MA, USA (pp. pp. 1606-1609).

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Abstract:A resistive sensor array is presented for two dimensional temperature distribution measurements in a micromachined flow channel. This allows simultaneous measurement of flow velocity and fluid parameters, like thermal conductivity, diffusion coefficient and viscosity. More general advantages of measuring temperature distributions are the inherent compensation of heat losses to the support and the insensitivity to variations in the temperature coefficient of resistance.
Item Type:Conference or Workshop Item
Copyright:© 2003 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Faculty of Behavioural, Management and Social sciences (BMS)
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Link to this item:http://purl.utwente.nl/publications/46521
Official URL:https://doi.org/10.1109/SENSOR.2003.1217088
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