A low electrostatic inchworm microactuator with high-resolution and large force

Sarajlic, E. and Berenschot, E. and Krijnen, G. and Elwenspoek, M. (2003) A low electrostatic inchworm microactuator with high-resolution and large force. In: Eurosensors XVII, European Conference on Solid-State Transducers, September 21-24, 2003, Guimaraes, Portugal.

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Abstract:	A novel electrostatic inchworm microactuator, which employs a built-in mechanical transformation and a large number of contraction units to generate large force and sub-micrometer resolution step, is presented. The actuator is fabricated in a single polysilicon device layer using a trench isolation technology. The entire actuator, including the clamps and the contraction element, fits in an area of 440 x 286 μm. Tests on the first prototype show an effective step size of 13 nm and a generated force of 0.55 mN. A driving voltage of 55 V has been used both for clamping and contraction.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/46520
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Metis ID: 215240