Low volume, large force (>1mN) and nanometer resolution, electrostatic microactuator for low displacement applications


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Sarajlic, E. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Low volume, large force (>1mN) and nanometer resolution, electrostatic microactuator for low displacement applications. In: Nanotech 2003 Nanotechnology Conference and Trade Show, Februari 23-28, 2003, San Francisco, Los Angeles, Boston (pp. pp. 392-395).

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Abstract:A compact electrostatic microactuator suitable for low displacement applications is proposed. The actuator employs a large number of basic units working in parallel together with a built-in mechanical transformation to generate large force. Influence of distinct design parameters on actuator performance was investigated. The actuator is successfully fabricated using the trench isolation technology. Displacement and generated force of the fabricated actuators, operated at pull-in, are measured using integrated springs and strain gauges. A large force (>1mN) with a controllable nanometer resolution step (<15 nm) was measured for a typical actuator design. The actuator fits in a volume of 200 × 62 × 5 um and is operated by a voltage of 70 V. Characteristic applications can include the contraction/elongation body of an inchworm motor, vibration excitation or friction measurements.
Item Type:Conference or Workshop Item
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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/46519
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