Parallel beams/lever electrothermal out-of-plane actuator


Deladi, S. and Krijnen, G. and Elwenspoek, M.C. (2003) Parallel beams/lever electrothermal out-of-plane actuator. In: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, 5-7 May, 2003, Mandelieu-la Napoule, France (pp. pp. 103-107).

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Abstract:We report on the design, modeling, fabrication and testing of a new electrothermal actuator allowing for various modes of movement and exhibiting large enough forces to be usable in a micro-tribotester. The performance of the actuator has been simulated combining numerical and analytical calculations. Experiments have been performed in ambient conditions and vacuum. The theoretical results and measurements are consistent if the temperature dependence of the properties of the polycrystalline Si is taken into account.
Item Type:Conference or Workshop Item
Copyright:© 2003 IEEE
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