Geometrical optimization of an acoustic thermal flow sensor

Honschoten van, J.W. and Ekkels, P. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Geometrical optimization of an acoustic thermal flow sensor. In: Eurosensors XVII, European Conference on Solid-State Transducers, September 21-24, 2003, Guimaraes, Portugal.

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Abstract:	In this paper a thermal acoustic flow sensor that measures particle velocity (the ‘Microflown’) is analyzed. A model is developed that calculates the sensor sensitivity and its frequency dependent behavior, as a function of material parameters and device geometry. Consequently, improved devices could be fabricated, with a new geometry consisting of three wires of which the central wire is relatively most heated. These are the best performing sensors up to date with a frequency range attending over 5 kHz and signal-to-noise ratios improved by 10 dB to more than 20 dB over previous designs.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/46501
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