Geometrical optimization of an acoustic thermal flow sensor


Honschoten, J.W. van and Ekkels, P. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Geometrical optimization of an acoustic thermal flow sensor. In: Eurosensors XVII, European Conference on Solid-State Transducers, September 21-24, 2003, Guimaraes, Portugal (pp. pp. 508-511).

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Abstract:In this paper a thermal acoustic flow sensor that measures particle velocity (the ‘Microflown’) is analyzed. A model is developed that calculates the sensor sensitivity and its frequency dependent behavior, as a function of material parameters and device geometry. Consequently, improved devices could be fabricated, with a new geometry consisting of three wires of which the central wire is relatively most heated. These are the best performing sensors up to date with a frequency range attending over 5 kHz and signal-to-noise ratios improved by 10 dB to more than 20 dB over previous designs.
Item Type:Conference or Workshop Item
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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