Protruding microgripper with force amplification and parallel jaw motion for in-situ sample manipulation in SEM and FIB-machines


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Krijnen, G. and Haanstra, R. and Potters, E. and Berenschot, J.W. and Harrach von, S. and Elwenspoek, M. (2003) Protruding microgripper with force amplification and parallel jaw motion for in-situ sample manipulation in SEM and FIB-machines. In: 12th International Conference on TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, June 8-12, 2003, Boston, USA.

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Abstract:We report on, to our best knowledge the first, protruding electrostatic microgripper with force amplification and parallel jaw motion for in-situ manipulation of sub-micrometer thick membranes in combined Scanning Electron Microscopy (SEM) / Focussed Ion Beam (FIB) machines. The gripper is used "upside-down" such that the highly doped silicon substrate shields the electrical fields resulting from the electrostatic actuation. Mechanical amplification is used to attain 3 /spl mu/m jaw-displacement with up to 195 /spl mu/N force from a comb-drive actuator array consisting of 1320 finger-pairs. Gripper movement was tested ex-and in-situ. The gripper-jaws moved several microns in both cases. FIB images shifted slightly at 40 V actuation voltage but were undistorted showing the effectiveness of shielding.
Item Type:Conference or Workshop Item
Copyright:© 2003 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/46304
Official URL:http://dx.doi.org/10.1109/SENSOR.2003.1215304
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