Studies of AIN growth on various substrates by RF reactive sputtering techniques
Saravanan, S. and Berenschot, J.W. and Boer de, M.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Studies of AIN growth on various substrates by RF reactive sputtering techniques. In: MicroMechanics Europe Workshop, MME 2003, November 2-4, 2003, Delft, The Netherlands.
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|Item Type:||Conference or Workshop Item|
Electrical Engineering, Mathematics and Computer Science (EEMCS)
|Link to this item:||http://purl.utwente.nl/publications/46302|
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