Studies of AIN growth on various substrates by RF reactive sputtering techniques

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Saravanan, S. and Berenschot, J.W. and Boer de, M.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Studies of AIN growth on various substrates by RF reactive sputtering techniques. In: MicroMechanics Europe Workshop, MME 2003, November 2-4, 2003, Delft, The Netherlands.

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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