Preparation of a dual sputtering PD-Cu alloy film and its application in hydrogen separation


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Tong, H.D. and Hoang Thi Hanh, H.T.H. and Gielens, F.C. and Jansen, H.V. and Elwenspoek, M.C. (2003) Preparation of a dual sputtering PD-Cu alloy film and its application in hydrogen separation. In: 14th MicroMechanics Europe Workshop, MME 2003, Nov. 2-4, 2003, Delft, The Netherlands.

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Metis ID: 214515