Distinction of the irreversible and reversible actuation regions of B-doped poly-Si based elctrothermal actuators


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Deladi, S. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Distinction of the irreversible and reversible actuation regions of B-doped poly-Si based elctrothermal actuators. In: MicroMechanics Europe Workshop, MME 2003, November 2-4, 2003, Delft, The Netherlands (pp. pp. 49-52).

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