A low hydraulic capacitance pressure sensor for integration with a micro viscosity detector


Heyden, F.H.J. van der and Blom, M.T. and Gardeniers, J.G.E. and Chmela, E. and Elwenspoek, M. and Tijssen, R.P. and Berg, A. van den (2003) A low hydraulic capacitance pressure sensor for integration with a micro viscosity detector. Sensors and Actuators B: Chemical, 92 (1-2). pp. 102-109. ISSN 0925-4005

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Abstract:A design is presented for a micromachined differential viscometer, that is suitable for integration into a planar hydrodynamic chromatography system (HDC) for polymer analysis. The viscometer consists of four equal flow restrictions and two pressure sensors, connected in a Wheatstone bridge configuration.
Since this viscometer requires an ultra-low hydraulic capacitance differential pressure sensor, a pressure sensor is presented of which the internal volume displacement was reduced considerably compared to commercially available sensors. An optical method was used to detect membrane deflections with a magnitude of approximately 0.01 nm. This method lead to a linearity of 1% over the measured pressure range and a resolution of 2 Pa.
With this pressure sensor integrated into the viscosity detector, viscosity measurements were performed on the viscosity difference of ethanol and water.
Item Type:Article
Copyright:© 2003 Elsevier Science B.V.
Science and Technology (TNW)
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/45881
Official URL:https://doi.org/10.1016/S0925-4005(03)00099-6
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