FEM Assisted design and simulation of novel electrochemical actuators

Deladi, S. and Krijnen, G.J.M. and Elwenspoek, M. (2003) FEM Assisted design and simulation of novel electrochemical actuators. In: Nanotech 2003 Nanotechnology Conference and Trade Show, Februari 23-28, 2003, San Francisco, Los Angeles, Boston.

Preview

PDF
1196Kb

Abstract:	In this work the authors present the design, simulation, and experimental results of novel electrothermal actuators, such as the trimorph actuator for out-of-plane motion, the coupled in-plane actuator for in-plane motion and an actuator providing combined in- and out-of-plane motion that have been developed for tribological studies. They can be easily embedded into complex MEMS devices due to the materials, which have been used for the fabrication. FEM simulations and experiments showed that the actuators are able to provide large forces to overcome adhesion and stiction.
Item Type:	Conference or Workshop Item
Copyright:	© 2003 NSTI Nano Science and Technology Institute
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/45294
Export this item as:	BibTeX EndNote HTML Citation Reference Manager

Show download statistics for this publication

Repository Staff Only: item control page

Metis ID: 211825