Fabrication of photonic crystal slabs and defects using laser interference lithography and focused ion beam-assisted depositon


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Ridder de, René M. and Bostan, Cazimir G. and Wolferen van, Henk A.G.M. and Dorssen van, Inge and Vogelaar, Laura and Segerink, Frans B. and Kuipers, Laurens and Hulst van, Niek F. (2002) Fabrication of photonic crystal slabs and defects using laser interference lithography and focused ion beam-assisted depositon. In: 4th International Conference on Transparent Optical Networks, ICTON 2002, April 21-25, 2002, Warsaw, Poland.

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Abstract:A method is described for fabricating photonic crystal slabs, using a combination of laser interference lithography for generating a regular periodic structure (the crystal lattice), and focused ion beam-assisted deposition for defining defects in this lattice, which may act as waveguides or resonators. As an example, results will be shown of a photonic crystal slab with a line defect in silicon nitride.
Item Type:Conference or Workshop Item
Copyright:© 2002 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/44056
Official URL:http://dx.doi.org/10.1109/ICTON.2002.1007836
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Metis ID: 208291