MEMS VOA with polymeric thermal microactuators

Diemeer, M.B.J. and Dekker, R. (2002) MEMS VOA with polymeric thermal microactuators. In: 28th European Conference on Optical Communication, ECOC, 2002, September 9-11, 2002, Copenhagen, Denmark.

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Abstract:	A MEMS VOA with polymeric microactuators using microoptics is presented. Its insertion loss < 0.5 dB, dynamic range > 50 dB, power and time for 20 dB, < 40 mW and 40 ms resp.
Item Type:	Conference or Workshop Item
Copyright:	©2002 IEEE
Research Group:	Integrated Optical MicroSystems (IOMS)
Link to this item:	http://purl.utwente.nl/publications/44029
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Metis ID: 208230