2D finite element simulations for long range capacitive position sensor


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Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (2002) 2D finite element simulations for long range capacitive position sensor. In: MME 2002, The 13th Micromechanics Europe Workshop, 6-8 October 2002, Sinaia, Romania.

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