2D finite element simulations for long range capacitive position sensor

Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (2002) 2D finite element simulations for long range capacitive position sensor. In: MME 2002, The 13th Micromechanics Europe Workshop, 6-8 October 2002, Sinaia, Romania.

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Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
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