Micromachined palladium silver alloy membranes for hydrogen separation

Tong, H.D. and Gielens, F.C. and Berenschot, J.W. and Boer de, M.J. and Gardeniers, J.G.E. and Jansen, H.V. and Nijdam, W. and Rijn van, C.J.M. and Elwenspoek, M.C. (2002) Micromachined palladium silver alloy membranes for hydrogen separation. In: SESENS 2002, November 29-30, 2002, Veldhoven, The Netherlands.

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Abstract:	This paper presents wafer-scale palladium - silver alloy membranes, fabricated with a sequence of wellknown thin film and silicon micromachining techniques. The membranes have been tested in a gas permeation system to determine the hydrogen permeability and hydrogen selectivity. Typical flow rates of 1 mol H2 /m2.s have been measured with a minimal selectivity of 1500 for H2/He. The membranes have high mechanical strength and can withstand pressures up to 4 bars at room temperature. These membranes have the potential to be used for hydrogen purification and other applications such as membrane reactors for hydrogenation/dehydrogenation reactions. The presented fabrication method also allows the development of a module for industrial applications that consists of a stack with a large number of glass/membrane plates.
Item Type:	Conference or Workshop Item
Faculty:	Science and Technology (TNW) Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Mesoscale Chemical Systems (MCS) Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/43881
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