Monolithic Integration of a Novel Microfluidic Device with Silicon Light Emitting Diode-Antifuse and Photodetector


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LeMinh, P. and Holleman, J. and Berenschot, J.W. and Tas, N.R. and Berg, A. van den (2002) Monolithic Integration of a Novel Microfluidic Device with Silicon Light Emitting Diode-Antifuse and Photodetector. In: 32nd European Solid-State Device Research Conference, ESSDERC, 24-26 September 2002, Firenze, Italy (pp. pp. 451-454).

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Abstract:Light emitting diode antifuse has been integrated into a microfluidic device that is realized with extended standard CMOS technological steps. The device comprises of a microchannel sandwiched between a photodiode detector and a nanometer-scale diode antifuse light emitter. Within this contribution, the device fabrication process, working principle and properties will be discussed. Change in the interference fringe of the antifuse spectra has been measured due to the filling of the channel. Preliminary applications are electroosmotic flow speed measurement, detection of absorptivity of liquids in the channel
Item Type:Conference or Workshop Item
Copyright:© 2002 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/43819
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