Scaling behaviour of pressure driven micro hydraulic systems


Tas, N.R. and Lammerink, T.S.J. and Berenschot, J.W. and Elwenspoek, M.C. and Berg, A. van den (2002) Scaling behaviour of pressure driven micro hydraulic systems. In: International Conference on Modeling and Simulation of Microsystems, MSM, April 22-25, 2002, Puerto Rico, USA (pp. pp. 174-177).

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Abstract:This paper presents a lumped network approach for the modelling and design of micro-hydraulic systems. A hydraulic oscillator has been built consisting of hydraulic resistors, capacitors and transistors (pressure controlled valves). The scaling of micro-hydraulic networks consisting of linear resistors, capacitors and inertances has been studied. An important result is that to make smaller networks faster, driving pressures should increase with reducing size.
Item Type:Conference or Workshop Item
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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