Innovative process development for a new microtribosensor using surface micromachining


Share/Save/Bookmark

Deladi, S. and Boer de, M.J. and Rosén, D. and Krijnen, G.J.M. and Elwenspoek, M.C. (2002) Innovative process development for a new microtribosensor using surface micromachining. In: Micromechanics Europe Workshop, MME 2002, 6-8 October 2002, Sinaia, Romania.

Full text not available from this repository. The author is invited to upload the full text of this publication.

Item Type:Conference or Workshop Item
Link to this item:http://purl.utwente.nl/publications/43409
Export this item as:BibTeX
EndNote
HTML Citation
Reference Manager

 

Repository Staff Only: item control page

Metis ID: 206529