Innovative process development for a new microtribosensor using surface micromachining


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Deladi, S. and Boer, M.J. de and Rosén, D. and Krijnen, G.J.M. and Elwenspoek, M.C. (2002) Innovative process development for a new microtribosensor using surface micromachining. In: Micromechanics Europe Workshop, MME 2002, 6-8 October 2002, Sinaia, Romania (pp. pp. 63-66).

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