Innovative process development for a new microtribosensor using surface micromachining

Deladi, S. and Boer de, M.J. and Rosén, D. and Krijnen, G.J.M. and Elwenspoek, M.C. (2002) Innovative process development for a new microtribosensor using surface micromachining. In: Micromechanics Europe Workshop, MME 2002, 6-8 October 2002, Sinaia, Romania.

Full text not available from this repository. The author is invited to upload the full text of this publication.

Item Type:	Conference or Workshop Item
Link to this item:	http://purl.utwente.nl/publications/43409
Export this item as:	BibTeX EndNote HTML Citation Reference Manager

Show download statistics for this publication

Repository Staff Only: item control page

Metis ID: 206529

Education
▪ Behavioural Sciences
▪ Management and Governance
▪ Engineering Technology
▪ Electrical Engineering, Mathematics and Computer Science
▪ Science and Technology
▪ Geo-Information Science and Earth Observation
▪ Overview programmes

Research
▪ Centre for Telematics and Information Technology
▪ Institute for Behavioral Research
▪ Institute for Innovation and Governance Studies
▪ Institute of Mechanics, Processes and Control
▪ Mesa+ Institute for Nanotechnology
▪ MIRA Biomedical Technology and Technical Medicine

Cooperation
▪ Alumni
▪ Universiteitsfonds
▪ Kennispark Twente
▪ Entrepreneurs
▪ The Science Shop
▪ Press