Pressure sensor based on distributed temperature sensing


Baar, J.J. van and Wiegerink, R.J. and Berenschot, J.W. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M. (2002) Pressure sensor based on distributed temperature sensing. In: IEEE Sensors Conference 2002, 12-14 June 2002 , Orlando, USA (pp. pp. 964-968).

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Abstract:A differential pressure sensor has been realized with thermal readout. The thermal readout allows simultaneous measurement of the membrane deflection due to a pressure difference and measurement of the absolute pressure by operating the structure as a Pirani pressure sensor. The measuring of the temperature distribution makes it possible to take the heat transfer to the support in to account and make the measurements independent of the temperature coefficient of resistance of the sensing elements.
Item Type:Conference or Workshop Item
Copyright:© 2002 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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