Combined -pirani/bending- membrane-pressure sensor


Baar, J.J. van and Wiegerink, R.J. and Lammerink, T.S.J. and Berenschot, E. and Krijnen, G.J.M. and Elwenspoek, M. (2002) Combined -pirani/bending- membrane-pressure sensor. In: 15th IEEE International Conference on Micro Electro Mechanical Systems, January 20-24, 2002, Las Vegas, Nevada, USA (pp. pp. 328-331).

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Abstract:A differential pressure sensor has been realized with thermal readout. The thermal readout allows simultaneous measurement of the membrane deflection due to a pressure difference and measurement of the absolute pressure by operating the structure as a Pirani pressure sensor
Item Type:Conference or Workshop Item
Copyright:© 2002 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Metis ID: 206364