Fabrication and characterization of MEMS based wafer scale palladium silver alloy membranes for hydrogen separation and hydrogenation/dehydrogenation reactions

Tong, H.D. and Gielens, F.C. and Berenschot, J.W. and Boer de, M.J. and Gardeniers, J.G.E. and Nijdam, W. and Rijn van, C.J.M. and Elwenspoek, M.C. (2002) Fabrication and characterization of MEMS based wafer scale palladium silver alloy membranes for hydrogen separation and hydrogenation/dehydrogenation reactions. In: 15th IEEE International Conference on Micro Electro Mechanical Systems, MEMS, January 20-24, 2002, Las Vegas, Nevada, USA.

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Abstract:	In this paper, a MEMS based wafer-scale palladium-silver alloy membrane (MWSPdAgM) is presented. This membrane has the potential to be used for hydrogen purification and other applications. A palladium-silver alloy layer (Pd-Ag) was prepared by co-sputtering. The thin Pd-Ag alloy has high hydrogen selectivity, high permeation rate as well as high mechanical and chemical stability. Typical flow rates of 0.5 mol H2/m2.s have been measured with a minimal selectivity of 550 for H2/N2. Anodic bonding of thick glass to silicon was used to package the membrane and create a very robust module. The membrane has high mechanical strength and can withstand pressures up to 4 bars at room temperature. The presented fabrication method allows the development of a module for industrial applications that consists of a stack with a large number of glass/membrane plates
Item Type:	Conference or Workshop Item
Copyright:	© 2002 IEEE
Faculty:	Science and Technology (TNW) Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Mesoscale Chemical Systems (MCS) Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/43325
Official URL:	http://dx.doi.org/10.1109/MEMSYS.2002.984254
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