Advanced sacrificial poly-Si technology for fluidic systems


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Berenschot, J.W. and Tas, N.R. and Lammerink, T.S.J. and Elwenspoek, M.C. and Berg, A. van den (2001) Advanced sacrificial poly-Si technology for fluidic systems. In: Transducers '01-Eurosensors XV, June 10-14th 2001, Munich, Germany (pp. pp. 624-627).

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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