Advanced sacrificial poly-Si technology for fluidic systems

Berenschot, J.W. and Tas, N.R. and Lammerink, T.S.J. and Elwenspoek, M.C. and Berg van den, A. (2001) Advanced sacrificial poly-Si technology for fluidic systems. In: Transducers '01-Eurosensors XV, June 10-14th 2001, Munich, Germany.

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Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST) Biomedical and Environmental Sensor systems (BIOS)
Link to this item:	http://purl.utwente.nl/publications/42631
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Metis ID: 202379