Sensitive thermal flow sensor based on a micro-machined two dimensional resistor array


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Baar van, J.J.J. and Wiegerink, R.J. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. (2001) Sensitive thermal flow sensor based on a micro-machined two dimensional resistor array. In: 11th International Conference on Solid-State Sensors and Actuators, Transducers 2001, 10-14 June 2001, Munich, Germany.

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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