Electrostatic microactuators


Krijnen, G.J.M. and Tas, N.R. and Elwenspoek, M.C. (2001) Electrostatic microactuators. In: International Conference on SMART Technology Demonstrators & Devices, 12-14 December 2001, Edinburgh, UK.

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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