A light detection cell to be used in a micro analysis system for ammonia

Tiggelaar, R.M. and Veenstra, T.T. and Sanders, R.G.P. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Berg van den, A. (2002) A light detection cell to be used in a micro analysis system for ammonia. Talanta, 56 (2). pp. 331-339. ISSN 0039-9140

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Abstract:	This paper describes the design, realization and characterization of a micromachined light detection cell. This light detection cell is designed to meet the specifications needed for a micro total analysis system in which ammonia is converted to indophenol blue. The concentration of indophenol blue is measured in a light detection cell. The light detection cell was created using KOH/IPA etching of silicon. The KOH/IPA etchant was a 31 wt.% potassium hydroxide (KOH) solution with 250 ml isopropyl alcohol (IPA) per 1000 ml H2O added to it. The temperature of the solution was 50°C. Etching with KOH/IPA results in 45° sidewalls ( ${110}$ planes) which can be used for the in- and outcoupling of the light. The internal volume of the realized light detection cell is smaller than 1 µl, enabling measurements on samples in the order of only 1 µl. Measurements were performed on indophenol blue samples in the range of 0.02 to 50 µM. In this range the measurements showed good reproducibility.
Item Type:	Article
Copyright:	© 2002 Elsevier Science B.V.
Faculty:	Science and Technology (TNW) Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Mesoscale Chemical Systems (MCS) Transducers Science and Technology (TST) Biomedical and Environmental Sensor systems (BIOS)
Link to this item:	http://purl.utwente.nl/publications/42360
Official URL:	http://dx.doi.org/10.1016/S0039-9140(01)00599-9
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