Micro electro mechanical systems: case studies


Elwenspoek, M.C. and Wiegerink, R.J. (2001) Micro electro mechanical systems: case studies. In: Azfal Suleman (Ed.), SMART structures: applications and related technologies. CISM International Centre for Mechanical Sciences (429). Springer Wien New York. ISBN 9783211836811

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Item Type:Book Section
Copyright:© 2001 Springer
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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