Micro electro mechanical systems: case studies

Elwenspoek, M.C. and Wiegerink, R.J. (2001) Micro electro mechanical systems: case studies. In: SMART structures: applications and related technologies. CISM International Centre for Mechanical Sciences (429). Springer Wien New York. ISBN 9783211836811

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Item Type:	Book Section
Copyright:	© 2001 Springer
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/42346
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Metis ID: 201129