Micro electro mechanical systems: principles of measurement mechanical quantities: transduction of deformation

Elwenspoek, M.C. and Wiegerink, R.J. (2001) Micro electro mechanical systems: principles of measurement mechanical quantities: transduction of deformation. In: SMART structures: applications and related technologies. Springer Wien New York, Italy. ISBN 9783211836811

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Item Type:	Book Section
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/42345
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