Micro electro mechanical systems: silicon micromachining


Elwenspoek, M.C. and Wiegerink, R.W. (2001) Micro electro mechanical systems: silicon micromachining. In: A. Suleman (Ed.), SMART structures: applications and related technologies. Springer Wien New York, Italy. ISBN 9783211836811

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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