Fluorocarbon coated micromachined gas sampling device


Timmer, B.H. and Bomer, J.G. and Delft, K.M. van and Otjes, R.P. and Olthuis, W. and Bergveld, P. and Berg, A. van den (2001) Fluorocarbon coated micromachined gas sampling device. In: MicroTAS 2001 Symposium, October 21–25, 2001, Monterey, CA, USA (pp. pp. 381-382).

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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