Fluorocarbon coated micromachined gas sampling device


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Timmer, B.H. and Bomer, J.G. and Delft van, K.M. and Otjes, R.P. and Olthuis, W. and Bergveld, P. and Berg van den, A. (2001) Fluorocarbon coated micromachined gas sampling device. In: MicroTAS 2001 Symposium, October 21–25, 2001, Monterey, CA, USA.

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Metis ID: 200474