Micro-machining of a cryopenic imaging array of transition edge x-ray microcalorimeters

Bruijn, M.P. and Ridder, M. and Hoevers, H.F.C. and Bergmann, W.M. and Korte de, P.A.J. and Moktadir, Z. and Wiegerink, R.J. and Berenschot, J.W. and Elwenspoek, M.C. (2001) Micro-machining of a cryopenic imaging array of transition edge x-ray microcalorimeters. In: Sensor Technology 2001 Conference, 14-15 May, 2001, Enschede, the Netherlands.

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Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/42015
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Metis ID: 200194