Micro-machining of a cryopenic imaging array of transition edge x-ray microcalorimeters


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Bruijn, M.P. and Ridder, M. and Hoevers, H.F.C. and Bergmann, W.M. and Korte, P.A.J. de and Moktadir, Z. and Wiegerink, R.J. and Berenschot, J.W. and Elwenspoek, M.C. (2001) Micro-machining of a cryopenic imaging array of transition edge x-ray microcalorimeters. In: Sensor Technology 2001 Conference, 14-15 May, 2001, Enschede, the Netherlands (pp. pp. 179-184).

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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