A light absorption cell for microTAS with KOH/IPA etched 45 degrees mirrors in silicon


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Tiggelaar, R.M. and Veenstra, T.T. and Sanders, R.G.P. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Berg, A. van den (2001) A light absorption cell for microTAS with KOH/IPA etched 45 degrees mirrors in silicon. In: Sensor Technology 2001 Conference, 14-15 May, 2001, Enschede, the Netherlands (pp. pp. 137-142).

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Item Type:Conference or Workshop Item
Copyright:© 2001 Kluwer Academic
Faculty:
Science and Technology (TNW)
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/42013
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Metis ID: 200190