Mask materials for powder blasting

Wensink, Henk and Jansen, Henri V. and Berenschot, J.W. and Elwenspoek, Miko C. (2001) Mask materials for powder blasting. Journal of Micromechanics and Microengineering, 10 (2). pp. 175-180. ISSN 0960-1317

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Abstract:	Powder blasting, or abrasive jet machining (AJM), is a technique in which a particle jet is directed towards a target for mechanical material removal. It is a fast, cheap and accurate directional etch technique for brittle materials such as glass, silicon and ceramics. The particle jet (which expands to about 1 cm in diameter) can be optimized for etching, while the mask defines the small and complex structures. The quality of the mask influences the performance of powder blasting. In this study we tested and compared several mask types and added a new one: electroplated copper. The latter combines a highly resistant mask material for powder blasting with the high-resolution capabilities of lithography, which makes it possible to obtain an accurate pattern transfer and small feature sizes (<50 µm).
Item Type:	Article
Copyright:	© Institute of Physics and IOP Publishing Limited 2000
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/42000
Official URL:	http://dx.doi.org/10.1088/0960-1317/10/2/313
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