Mechanical microsensors

Elwenspoek, M. and Wiegerink, R. (2001) Mechanical microsensors. Microtechnology and MEMS, ISSN 1615-8326 . Springer Verlag, Berlin, Germany. ISBN 9783540675822

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Item Type:	Book
Copyright:	© 2001 Springer
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/41743
Publisher URL:	http://www.springer.com/materials/nanotechnology/book/978-3-540-67582-2
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Metis ID: 112441