Radio frequency power sensor based on MEMS technology


Fernandez, Luis J. and Visser, Eelke and Sesé, Javier and Wiegerink, Remco and Jansen, Henri and Flokstra, Jaap and Elwenspoek, Miko (2003) Radio frequency power sensor based on MEMS technology. In: IEEE Sensors Conference 2003, October 22-24, 2003, Toronto, Canada (pp. pp. 549-552).

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Abstract:We present the first measurement results of a power sensor for radio frequency (rf) signals (50 kHz - 40 GHz) with almost no dissipation during the measurement. This sensor is, therefore, a 'through' power sensor, that means that the rf signal is available during the measurement of its power. The power detection has been realized by measuring capacitively the movement of a grounded aluminum membrane, which is suspended above the transmission line carrying the rf signal. The power sensor is thus a capacitive MEMS technology based sensor. The fabrication is done by aluminum surface micromachining on an AF45 glass wafer. We measured the capacitance as a function of the applied rf power and found a linear relationship as predicted from theory.
Item Type:Conference or Workshop Item
Copyright:© 2003 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Science and Technology (TNW)
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Metis ID: 216956