Radio frequency power sensor based on MEMS technology


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Fernandez, Luis J. and Visser, Eelke and Sesé, Javier and Wiegerink, Remco and Jansen, Henri and Flokstra, Jaap and Elwenspoek, Miko (2003) Radio frequency power sensor based on MEMS technology. In: IEEE Sensors Conference 2003, October 22-24, 2003, Toronto, Canada (pp. pp. 549-552).

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Abstract:We present the first measurement results of a power sensor for radio frequency (rf) signals (50 kHz - 40 GHz) with almost no dissipation during the measurement. This sensor is, therefore, a 'through' power sensor, that means that the rf signal is available during the measurement of its power. The power detection has been realized by measuring capacitively the movement of a grounded aluminum membrane, which is suspended above the transmission line carrying the rf signal. The power sensor is thus a capacitive MEMS technology based sensor. The fabrication is done by aluminum surface micromachining on an AF45 glass wafer. We measured the capacitance as a function of the applied rf power and found a linear relationship as predicted from theory.
Item Type:Conference or Workshop Item
Copyright:© 2003 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Science and Technology (TNW)
Research Group:
Link to this item:http://purl.utwente.nl/publications/41029
Official URL:http://dx.doi.org/10.1109/ICSENS.2003.1278998
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Metis ID: 216956