Ultralow-k dielectrics made by supercritical foaming of thin polymer films

Krause, Bernd and Koops, Geert-Henk and Vegt van der, Nico F.A. and Wessling, Matthias and Wubbenhorst, Michel and Turnhout van, Jan (2002) Ultralow-k dielectrics made by supercritical foaming of thin polymer films. Advanced Materials, 14 (15). pp. 1041-1046. ISSN 0935-9648

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Item Type:	Article
Copyright:	© WILEY-VCH Verlag
Faculty:	Science and Technology (TNW)
Research Group:	Membrane Science and Technology (MST)
Link to this item:	http://purl.utwente.nl/publications/38178
Official URL:	http://dx.doi.org/10.1002/1521-4095(20020805)14:15<1041::AID-ADMA1041>3.0.CO;2-A
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