Large area photonic crystal slabs for visible light with waveguiding defect structures: Fabrication with focused ion beam assisted laser interference lithography

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Vogelaar, Laura and Nijdam, Wietze and Wolferen van, Henk A.G.M. and Ridder de, René M. and Segerink, Frans B. and Flück, Eliane and Kuipers, Laurens and Hulst van, Niek F. (2001) Large area photonic crystal slabs for visible light with waveguiding defect structures: Fabrication with focused ion beam assisted laser interference lithography. Advanced Materials, 13 (20). pp. 1551-1554. ISSN 0935-9648

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Abstract:Extended photonic crystal slabs with light-guiding defects have been created by a combination of laser interference lithography (LIL) and local focused ion beam (FIB) assisted deposition. Large area, highly uniform photonic crystal slabs for visible light are thus made possible. The Figure shows a freestanding Si3N4-air photonic crystal with a light- guiding defect line running along the center of the slab (total length = 1 mm).
Item Type:Article
Copyright:© 2001 Wiley
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/36440
Official URL:http://dx.doi.org/10.1002/1521-4095(200110)13:20<1551::AID-ADMA1551>3.0.CO;2-V
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Metis ID: 202027