Powder-blasting technology as an alternative tool for micro-fabrication of CE-chip with integrated conductivity sensors

Share/Save/Bookmark

Schlautmann, Stefan and Wensink, Henk and Schasfoort, Richard and Elwenspoek, Miko and Berg van den, Albert (2001) Powder-blasting technology as an alternative tool for micro-fabrication of CE-chip with integrated conductivity sensors. Journal of Micromechanics and Microengineering, 11 (4). pp. 386-389. ISSN 0960-1317

[img]PDF
Restricted to UT campus only
: Request a copy
123Kb
Abstract:The fabrication and characterization of a microfluidic device for capillary electrophoresis applications is presented. The device consists of a glass chip which contains a single separation channel as well as an integrated conductivity detection cell. In contrast to most microfluidic glass devices the channels are not wet etched in HF but machined by the newly developed micro powder-blasting technique which allows the creation of microstructures below 100 µm, and additionally makes parallel hole machining at very low costs outside the cleanroom environment possible [1, 2]. The integration of the conductivity detector was achieved by leading two thin-film metal electrodes inside the separation channel. For rapid sample injection the chip is mounted inside an autosampler-based capillary electrophoresis platform. The detection electrodes for conductivity detection are read out by lock-in amplifier electronics. First measurements show the successful separation of various ions in the sub-millimeter range.
Item Type:Article
Copyright:© Institute of Physics and IOP Publishing Limited 2001
Faculty:
Science and Technology (TNW)
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/36306
Official URL:http://dx.doi.org/10.1088/0960-1317/11/4/318
Export this item as:BibTeX
EndNote
HTML Citation
Reference Manager

 

Repository Staff Only: item control page

Metis ID: 201536