169 kelvin cryogenic microcooler empoying a condenser, evaporator, flow restriction and counterflow heat exchangers

Burger, Johannes and Holland, Harry and Berenschot, Erwin and Seppenwolde, Jan-Henry and Brake ter, Marcel and Gardeniers, Han and Elwenspoek, Miko (2001) 169 kelvin cryogenic microcooler empoying a condenser, evaporator, flow restriction and counterflow heat exchangers. In: 14th IEEE International Conference on Micro Electro Mechanical Systems, MEMS, 21-25 Jan. 2001, Interlaken, Switzerland.

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Abstract:	This paper presents the first cryogenic micromachined cooler that is suitable to cool from ambient temperature to 169 kelvin and below. The cooler operates with the vapor compression cycle. It consists of a silicon micromachined condenser, a flow restriction/evaporator and two miniature glass-tube counterflow heat exchangers, which are integrated with the silicon components using a novel gluing technique. The system was tested with ethylene gas from 20 to 1 bar, and produces a cooling power of 200 mW at 169 K with a mass flow of 0.5 mg/s
Item Type:	Conference or Workshop Item
Copyright:	© 2001 IEEE
Faculty:	Science and Technology (TNW) Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Energy, Materials and Systems (EMS) Mesoscale Chemical Systems (MCS) Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/36298
Official URL:	http://dx.doi.org/10.1109/MEMSYS.2001.906567
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