165 k microcooler operating with a sorption compressor and a micromachined cold stage
Burger, J.F. and Holland, H.J. and Seppenwoolde, J.H. and Berenschot, E. and Brake ter, H.J.M. and Gardeniers, J.G.E. and Elwenspoek, M. and Rogalla, H. (2001) 165 k microcooler operating with a sorption compressor and a micromachined cold stage. In: 11th International Cryocooler Conference, June 20-22, 2000, Keystone, Colorado, USA.
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|Abstract:||This paper presents the fabrication of a microcooler consisting of small stainless steel sorption compressor cells, micromachined silicon check valves, and a micromachined cold stage that incorporates glass-tube heat exchangers. The design, fabrication and experiments on the different elements are described. Two compressor cells were thermally cycled to investigate the dynamic behaviour. The cold stage could reach a stable temperature of 169 K with a cooling power of about 200 mW.
|Item Type:||Conference or Workshop Item|
|Copyright:||© Springer 2001|
Science and Technology (TNW)
Electrical Engineering, Mathematics and Computer Science (EEMCS)
|Link to this item:||http://purl.utwente.nl/publications/36195|
|Export this item as:||BibTeX|
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