165 k microcooler operating with a sorption compressor and a micromachined cold stage

Burger, J.F. and Holland, H.J. and Seppenwoolde, J.H. and Berenschot, E. and Brake ter, H.J.M. and Gardeniers, J.G.E. and Elwenspoek, M. and Rogalla, H. (2001) 165 k microcooler operating with a sorption compressor and a micromachined cold stage. In: 11th International Cryocooler Conference, June 20-22, 2000, Keystone, Colorado, USA.

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Abstract:	This paper presents the fabrication of a microcooler consisting of small stainless steel sorption compressor cells, micromachined silicon check valves, and a micromachined cold stage that incorporates glass-tube heat exchangers. The design, fabrication and experiments on the different elements are described. Two compressor cells were thermally cycled to investigate the dynamic behaviour. The cold stage could reach a stable temperature of 169 K with a cooling power of about 200 mW.
Item Type:	Conference or Workshop Item
Copyright:	© Springer 2001
Faculty:	Science and Technology (TNW) Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Energy, Materials and Systems (EMS) Mesoscale Chemical Systems (MCS) Transducers Science and Technology (TST) Low Temperatures - Biomagnetism (LT)
Link to this item:	http://purl.utwente.nl/publications/36195
Official URL:	http://dx.doi.org/10.1007/0-306-47112-4_69
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