165 k microcooler operating with a sorption compressor and a micromachined cold stage

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Burger, J.F. and Holland, H.J. and Seppenwoolde, J.H. and Berenschot, E. and Brake, H.J.M. ter and Gardeniers, J.G.E. and Elwenspoek, M. and Rogalla, H. (2001) 165 k microcooler operating with a sorption compressor and a micromachined cold stage. In: 11th International Cryocooler Conference, June 20-22, 2000, Keystone, Colorado, USA (pp. pp. 551-560).

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Abstract:This paper presents the fabrication of a microcooler consisting of small stainless steel sorption compressor cells, micromachined silicon check valves, and a micromachined cold stage that incorporates glass-tube heat exchangers. The design, fabrication and experiments on the different elements are described. Two compressor cells were thermally cycled to investigate the dynamic behaviour. The cold stage could reach a stable temperature of 169 K with a cooling power of about 200 mW.
Item Type:Conference or Workshop Item
Copyright:© Springer 2001
Faculty:
Science and Technology (TNW)
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/36195
Official URL:http://dx.doi.org/10.1007/0-306-47112-4_69
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