Growth mode transition from layer by layer to step flow during the growth of heteroepitaxial SrRuO3 on (001) SrTiO3

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Choi, J. and Eom, C.B. and Rijnders, G. and Rogalla, H. and Blank, D.H.A. (2001) Growth mode transition from layer by layer to step flow during the growth of heteroepitaxial SrRuO3 on (001) SrTiO3. Applied Physics Letters, 79 (10). pp. 1447-1449. ISSN 0003-6951

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Abstract:We have observed the growth mode transition from two-dimensional (2D) layer-by-layer to step-flow in the earliest stage growth of heteroepitaxial SrRuO3 thin films on TiO2-terminated (001) SrTiO3 substrates by in situ high pressure reflective high energy electron diffraction (RHEED) and atomic-force microscopy. There is no RHEED intensity recovery after each laser pulse in the first oscillation when the growth mode is 2D layer-by-layer. On the other hand, it is getting more pronounced in the second oscillation, and finally reaches a dynamic steady state in which the growth mode is completely changed into the step-flow mode. The origin of the growth mode transition can be attributed to a change in the mobility of adatoms and switching the surface termination layer from the substrate to the film. SrRuO3 thin films with an atomically smooth surface grown by atomic layer control can be used in oxide multilayered heterostructure devices.
Item Type:Article
Copyright:© 2001 American Institute of Physics
Faculty:
Science and Technology (TNW)
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Link to this item:http://purl.utwente.nl/publications/36070
Official URL:http://dx.doi.org/10.1063/1.1389837
Publisher URL:http://link.aip.org/link/?APPLAB/79/1447/1
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